Virtual Bookstore Citation Title DAMAGE PROFILES IN SILICON AND THEIR IMPACT ON DEVICE RELIABILITY. Author(s) Schwuttke,G. H. ; Corporate Author(s) INTERNATIONAL BUSINESS MACHINES CORP HOPEWELL JUNCTION N Y EAST FISHKILL LAB Report Date 7/1/1975 Page Count 65 Abstract This report describes work dealing with improvements of advancedmeasurement techniques. Chapter 1 deals with the computer generation of Kikuchipatterns needed for complex structural analysis of crystal defects in silicon.The program is applicable to a lar Price: $44.75 Available in hardcopy. (2 week delivery).   Prices are plus sales tax when purchased within New York State and shipping charges, if applicable